Nanoscale Localization Microscopy and Deterministic Lithography of Solid State Quantum Emitters

<p dir="ltr">Dataset associated with the manuscript titled "Nanoscale Localization Microscopy and Deterministic Lithography of Solid State Quantum Emitters.</p><p dir="ltr">The dataset is structured into sub-folders, where each folder corresponds to one figure in the manuscript. The data in each subplot is presented in individual "CSV" files. A short description of each dataset is found below.</p><p dir="ltr">Fig2a.csv - Confocal laser-scanning microscopy image of the reflection of metallic markers. The data is a 2D array of photon intensity, where the first row incorporates the X axis, the first column the Y. The remaining dataset is the measured photon intensity at each pixel of the image. The units for both axis are in micro-meters.</p><p dir="ltr">Fig2_b.csv - Confocal laser-scanning microscopy image of the fluorescence from quantum emitters. The data is a 2D array of photon intensity, where the first row incorporates the X axis, the first column the Y. The remaining dataset is the measured photon intensity at each pixel of the image. The units for both axis are in micro-meters.</p><p dir="ltr">Fig2_b_overlay.csv - Positions of the quantum emitters in the image of Fig2_b.csv (green circles in the Figure).</p><p dir="ltr">Fig2_c.csv - Bivariant histogram of the localized position of 300 repeats of the marker MK4 and emitter QE3, presented as a 2D array. The first row incorporates the Y axis, the first column the X. The remaining dataset is the binned frequency at each pixel of the image. The units for both axis are in micro-meters.</p><p dir="ltr">Fig2_c_inset_MK4_TopRight.csv - Bivariant histogram of the localized position of 300 repeats of the marker MK4, presented as a 2D array. The first row incorporates the Y axis, the first column the X. The remaining dataset is the binned frequency at each pixel of the image. The units for both axis are in micro-meters.</p><p dir="ltr">Fig2_c_inset_QE3_BottomLeft.csv - Bivariant histogram of the localized position of 300 repeats of the emitter QE3, presented as a 2D array. The first row incorporates the Y axis, the first column the X. The remaining dataset is the binned frequency at each pixel of the image. The units for both axis are in micro-meters.</p><p dir="ltr">Fig2_d.csv - The X position delta, taken from the mean of the dataset, as a function of the sample number for 300 repeat samples.</p><p dir="ltr">Fig2_e.csv - Binned X position delta of the the data presented in "Fig2_d.csv". The corresponding Gaussian fit line is additionally included.</p><p dir="ltr">Fig2_f.csv - Binned Y position delta. The corresponding Gaussian fit line is additionally included.</p><p dir="ltr">Fig2_g.csv - The relative X position delta, taken from the mean of the dataset, as a function of the sample number for 300 repeat samples.</p><p dir="ltr">Fig2_h.csv - Binned relative X position delta of the the data presented in "Fig2_d.csv". The corresponding Gaussian fit line is additionally included.</p><p dir="ltr">Fig2_i.csv - Binned relative Y position delta. The corresponding Gaussian fit line is additionally included.</p><p dir="ltr">Fig3_a.csv - The position error in both X and Y from projecting the expected positions of quantum emitters as compared to a direct measurement. The X and Y positions are in micro-meters.</p><p dir="ltr">Fig3_b.csv - Histograms of the position error in X. The histograms data is accompanied with the Gaussian fit line.</p><p dir="ltr">Fig3_c.csv - Histograms of the position error in Y. The histograms data is accompanied with the Gaussian fit line.</p><p dir="ltr">Fig4_a.csv - Confocal laser-scanning microscopy image of the fluorescence from quantum emitters, after deterministic lithography. The data is a 2D array of photon intensity, where the first row incorporates the X axis, the first column the Y. The remaining dataset is the measured photon intensity at each pixel of the image. The units for both axis are in micro-meters.</p><p dir="ltr">Fig4_b.csv - Confocal laser-scanning microscopy image of the reflection of metallic markers, after deterministic lithography. The data is a 2D array of photon intensity, where the first row incorporates the X axis, the first column the Y. The remaining dataset is the measured photon intensity at each pixel of the image. The units for both axis are in micro-meters.</p><p dir="ltr">Fig4_b_overlay.csv - Positions of the quantum emitters in the image of Fig4_b.csv (green circles in the Figure).</p><p dir="ltr">Fig5a.csv - Confocal laser-scanning microscopy image of the fluorescence from quantum emitter QE3. The data is a 2D array of photon intensity, where the first row incorporates the X axis, the first column the Y. The remaining dataset is the measured photon intensity at each pixel of the image. The units for both axis are in micro-meters.</p><p dir="ltr">Fig5_b.csv - Confocal laser-scanning microscopy image of the reflection around quantum emitter QE3. The data is a 2D array of photon intensity, where the first row incorporates the X axis, the first column the Y. The remaining dataset is the measured photon intensity at each pixel of the image. The units for both axis are in micro-meters.</p><p dir="ltr">Fig5_c.csv - Optical pump power dependent intensity measurement of the quantum emitter QE3 before and after embedment in a micro-pillar. </p><p dir="ltr">Fig5_d.csv - Optical pump power dependent intensity measurement of the quantum emitter QE12 before and after embedment in a micro-pillar. </p><p dir="ltr">Fig5_e.csv - Second-order correlation measurement of the photon statistics of QE3. </p>