Insight into mechanics of AFM tip-based nanomachining: bending of cantilevers and machined grooves

This is the complete data set for a study on the quasi-static behaviour of the cantilever of AFM probes during AFM tip-based nanomachining operations. It comprises a number of related data sub-sets. Example of a voltage signal recorded from a strain gauge (hereinafter referred to as “Z-detector”) mounted on a piezo actuator which defines the vertical motion of the fixed end of AFM probes, in the so-called backward direction. Z-detector output signals recorded during processing of a copper sample and a polycarbonate (PC) sample machined along the backward direction with normal loads of 13 µN and 34 µN (for copper) and along an inclined backward direction with normal loads of 3.1 µN and  4.4 µN (for PC). A typical signal corresponding to the voltage output of a position sensitive photodetector (hereinafter referred to as “PSPD”) and a typical signal recorded at the same time, from the AFM controller when defining the Y axis motions of the AFM stage. Recorded Z-detector and Y stage output signals when processing a copper sample along the forward direction for a set normal load of 20 µN. Recorded Z-detector and Y stage output signals when processing a copper sample along the forward direction for a set normal load of 24 µN. Recorded Z-detector and Y stage output signals when processing a copper sample along the forward direction for a set normal load of 27 µN. Recorded signals for the Z-detector and the PSPD when processing of a copper sample along the forward direction with a normal load of 31 µN. Recorded signals for the Z-detector and the PSPD when processing of a copper sample along the forward direction with a normal load of 39 µN. Recorded Z-detector signals obtained when machining a PC specimen along an inclined forward direction for a set normal applied load of 3.1 μN and 4.4 μN. In addition, the following Scanning Electron Micrographs are also included in the data set: SEM images of grooves obtained on a copper sample when machining in the forward direction with a range of set normal loads comprised between 31 µN and 39 µN. Finally, an AFM scan of the groove obtained for a set normal load of 34 µN in the forward direction is also given and is accompanied with the raw data used to plot specific cross sections of the groove.

Results based upon these data are published at http://doi.org/10.1088/0957-4484/27/38/385302