Increasing the processing speed of AFM tip-based nanomachining at the tool-workpiece interface

This is the complete data set for a study, which aimed to increase the speed of the AFM tip-based nanomachining process at the interface between the tool and the workpiece. It comprises a number of related data sub-sets as follows:

1) Measured amplitude of the reciprocating motions of the piezoelectric actuator utilised (model NAC2402-H2.3 from Noliac, Denmark) as a function of the driving frequency.

2) AFM scanned data of three machined grooves with different frequencies: 10 Hz, 10 kHz, and 40 kHz for a stage velocity of 100 μm/s.

3) Further Profile data of the cross-sections extracted from the three grooves mentioned in point 2) above.