Experimental dataset for: Microwave plasma modelling in clamshell chemical vapour deposition diamond reactors

This experimental dataset contains characterisation of microwave plasma chemical vapour deposited (MPCVD) diamond films on 1" diameter, 500 um thick Si wafers using sample pucks of varying heights.

Characterisation includes:

- Pyrometry temperature traces for the duration of MPCVD growth.
- Raman spectroscopy line scans across the diameter of all of the samples from 330 to 1990 cm^-1 with 532 nm laser and a 5x objective (details and settings provided)
- Scanning electron microscopy images of the samples from at a fixed magnification (2,000x) and varying radial positions (from the centre of the sample to the edge). 

Research results based upon these data are published at https://doi.org/10.1016/j.diamond.2022.108917