Experimental dataset for: Microwave plasma modelling in clamshell chemical vapour deposition diamond reactors

<p>This experimental dataset contains characterisation of microwave plasma chemical vapour deposited (MPCVD) diamond films on 1" diameter, 500 um thick Si wafers using sample pucks of varying heights.</p><p>Characterisation includes:</p><p>- Pyrometry temperature traces for the duration of MPCVD growth.<br>- Raman spectroscopy line scans across the diameter of all of the samples from 330 to 1990 cm^-1 with 532 nm laser and a 5x objective (details and settings provided)<br>- Scanning electron microscopy images of the samples from at a fixed magnification (2,000x) and varying radial positions (from the centre of the sample to the edge). <br></p><p>Research results based upon these data are published at https://doi.org/10.1016/j.diamond.2022.108917 <br></p><p><br></p>