Experimental dataset for: In-situ monitoring of microwave plasma-enhanced chemical vapour deposition diamond growth on silicon using spectroscopic ellipsometry

<p>This experimental dataset contains <em>in-situ</em> and <em>ex-situ</em> sample characterisation data of diamond films grown bty microwave plasma-enhanced chemical vapour deposition (MPECVD).</p><p>Data includes:</p><p>-<em>In-situ </em>SE spectra of diamond films during growth.</p><p><em>-Ex-situ </em>spectroscopic ellipsometry (SE) spectra of diamond films.</p><p>-<em>Ex-situ </em>Atomic force microscopy images of diamond films.</p><p>-<em>Ex-situ </em>Raman spectra of diamond films.<br></p><p>Research results based upon these data are published at http://doi.org/10.1016/j.carbon.2022.10.049<br></p>