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Experimental dataset for: In-situ monitoring of microwave plasma-enhanced chemical vapour deposition diamond growth on silicon using spectroscopic ellipsometry

dataset

posted on 2024-09-18, 11:35 authored by William LeighWilliam Leigh, Evan ThomasEvan Thomas, Jerome CuencaJerome Cuenca, Soumen MandalSoumen Mandal, Oliver WilliamsOliver Williams

This experimental dataset contains in-situ and ex-situ sample characterisation data of diamond films grown bty microwave plasma-enhanced chemical vapour deposition (MPECVD).

Data includes:

-In-situ SE spectra of diamond films during growth.

-Ex-situ spectroscopic ellipsometry (SE) spectra of diamond films.

-Ex-situ Atomic force microscopy images of diamond films.

-Ex-situ Raman spectra of diamond films.

Research results based upon these data are published at http://doi.org/10.1016/j.carbon.2022.10.049

Funding

GaN on diamond (2016-12-01 - 2023-03-31); Williams, Oliver. Funder: Engineering and Physical Sciences Research Council

History

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CompleteEASE NanoScope Analysis LabSpec

Language(s) in dataset

English-Great Britain (EN-GB)

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Keywords

Diamonds

Licence

CC BY 4.0

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