Experiment dataset for: Mapping the Effect of Substrate Temperature Inhomogeneity During Microwave Plasma-Enhanced Chemical Vapour Deposition Nanocrystalline Diamond Growth

<p>This experimental dataset contains temperature and property mapping data of diamond films grown bty microwave plasma-enhanced chemical vapour deposition (MPECVD)</p><p>Data includes:<br>-<em>In-situ </em>temperature maps for several molybdenum substrate holders.<br>-Simulated plasma density during growth for the same holders.<br>-Raman spectroscopy maps of two polycrystalline diamond films.<br>-Spectroscopic ellipsometry map of a thin polycrystalline diamond film.<br></p><p>Research results based upon these data are published at https://doi.org/10.1016/j.carbon.2022.09.036<br></p><p><br></p><p><br></p><p></p>