Experiment dataset for: Mapping the Effect of Substrate Temperature Inhomogeneity During Microwave Plasma-Enhanced Chemical Vapour Deposition Nanocrystalline Diamond Growth

This experimental dataset contains temperature and property mapping data of diamond films grown bty microwave plasma-enhanced chemical vapour deposition (MPECVD)

Data includes:
-In-situ temperature maps for several molybdenum substrate holders.
-Simulated plasma density during growth for the same holders.
-Raman spectroscopy maps of two polycrystalline diamond films.
-Spectroscopic ellipsometry map of a thin polycrystalline diamond film.

Research results based upon these data are published at https://doi.org/10.1016/j.carbon.2022.09.036