Data - VCSEL quick fabrication of 894.6 nm wavelength epi‐material for miniature atomic clock applications

This dataset contains the raw data underpinning the publication titled "VCSEL quick fabrication of 894.6 nm wavelength epi‐material for miniature atomic clock applications"

In the folder labelled "Figure 3" there are two sub-folders labelled "standard" and "VQF" which refer to the different devices in fig 3. Withing each sub-folder are csv files containing light-current-voltage data (cols 0,1,2).

In the folder labelled Figure 4 & 5, there are two csv files. File labelled fig 4 contains height variation data across the 4-inch wafer. Cols 0,1 represnts X and Y coordinates and col 2 represents Z height calcualtion by a microscope foccusing function. File labelled fig 5 contains oxidation length variation data across the 4-inch wafer. Cols 0,1 represent X and Y coordinates and col 2 represents in-situ measured oxidation length.

In the folder labelled "Wafer Map Data", there are two sub-folders which represents data collected for two different device designs, which differ geometry and are designed for different oxidation lengths (this is specified in the folder name). Within each folder is data corresponding to measurements at 25 degrees C and 75 degrees C (included in folder name). Within these folders are 52 sub-folders corresponding to the 52 locations across the wafer where devices were measured. The XY numbers are converted to mm values for the wafer maps plots. The data files for the "8 Micron Oxidation Length" devices underpin the plots of fig 6,7,8,9. The data files for the "12 Micron Oxidation Length" devices underpin the plots of fig 10,11,12 & 13.

Research results based upon these data are published at https://doi.org/10.1049/ote2.12082